TINA 901

robust and reliable

The operation of this plant is based on the combination of two of our processes, which have stood the test of time: hollow cathode arc discharge, and vacuum arc discharge.

High plasma density is adjustable through hollow cathode discharge under low gas pressure.

Substrates are heated by electron impact and cleaned by ion bombardment.

The use of large evaporation sources with Ti, Cr, Zr, and TiAl targets enables deposition of metal nitrides, carbides and carbonitrides.

A dependable Siemens control system handles the automated process, and charging capacity is greatly enhanced by the use of a rotary table.

Sputter sources can be included, if required.

광량계, IL1700, IL1400, uv curing, radiometer, 경화, 자외선, 적외선, 근적외선, 원적외선, 가시광선, 건조, 화학방사선, 세정, 살균, 수처리, 태양광, 복사량측정, 광량계, 조도계, 광도계, 센서, 스펙트로메타, 라디오메타, 포토메타, 스펙트로라디오메타, uv, LED, 자외선측정, UV광량, IL393, IL290, LZ393, IL393, ILT400, ILT490, ILT1700, ILT1400, ILT900, ILT900 LED, 색차계,조사, 분광, 스펙트럼, 분석, 복사도, 환경, 생화학, 광생물학, 레이저,

ultraviolet radiation, uv meter, light bugs, UVA, UV-b, UV-A, UVB, UVC, UV-Cil290a, il390c, il393, uv exposure,

노광, spot irradiance measurements, il1747, il1447, il1745, il1445, pir irradiance calibration,

photometry, photometer system, photometric illuminance, flash photometer, radiometer, high gain lens, flash sources, flash effective intensity, il1710, il1410, il1711, il1715, radiometer, visible, near-ir, irradiance measurements, radiometry, spatial response, uv detection, radiance measurements, irradiance detector, nist traceable, il1705, il1405, il1715, photometer system, photoresist, a response, b response, uv measurement, blue visible irradiance, exposing photoresist, uva, photoresist equipment, radiometer, uv sensitivity, il1740a